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Instrument >> Instrument for Wafer >> Wafer Defect observing instrument:HS-WDI

■Application
■Semiconductor wafer
■Solar wafer
■Solar Cell
■Thin-film Cell

■Can measure distance between any two points
■Large advanced light and dark field objective, long working distance , high definition vision
■Stable, high-quality optical system, better contrast image

■Magnification: 50X-1000X
■Digital camera: > 300 million pixel CCD
■X, Y move range: 150mm × 180mm
■Resolution:0.00042mm
■Accuracy:±1μm
■Magnification:100X(objective),10/15X(Eyepiece)